Cleaning water production system
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United States of America Patent
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-
Mar 25, 1997
Issued Date -
N/A
app pub date -
Jun 11, 1996
filing date -
May 28, 1992
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A cleaning water production system in which pure water from a primary pure water production system is treated in a subsystem to produce ultrapure water, which is then sent to points of use through supply pipes, the point of use being connected to the subsystem through return pipes for returning unused cleaning water to the subsystem, wherein an extra-ultrapure water production system is provided at a distal end portion of the supply pipes near the point of use for supplying extra-ultrapure water to the points of use.
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