Method of engaging the scanning probe of a scanning probe microscope with a sample surface
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United States of America Patent
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Mar 25, 1997
Grant Date -
N/A
app pub date -
Mar 24, 1995
filing date -
Mar 24, 1995
priority date (Note) -
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Abstract
A method for initially positioning the scanning probe of a scanning probe microscope includes the steps of initially using fine position control to reduce the distance between probe and sample and, if the sample surface is not encountered, reversing the direction of the fine position control to an intermediate position and then using a coarse control in predetermined increments to narrow the distance between the probe and the sample. The fine control is again used and if the sample surface is not encountered, the steps are repeated until the surface is encountered so that the scanning operation can commence.
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