Method and system for triangulation-based, 3-D imaging utilizing an angled scaning beam of radiant energy
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United States of America Patent
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Apr 1, 1997
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N/A
app pub date -
Apr 27, 1995
filing date -
Apr 27, 1995
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Abstract
A method and system for three-dimensional imaging of objects, including integrated circuit interconnections to improve the efficiency of triangulation-based laser line scanning systems. A scanning beam is incident at a normal angle to the X,Y inspection plane with the scan line oriented at 45.degree., diagonal to an axis defining a first direction of motion. Motion of the imaging head along the axis is used to acquire line scan images in the non-orthogonal coordinate system.
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