Method of manufacturing a measuring device
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United States of America Patent
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Apr 8, 1997
Grant Date -
N/A
app pub date -
Mar 6, 1995
filing date -
May 5, 1992
priority date (Note) -
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status (Latency Note)
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Abstract
The invention concerns a method of manufacturing a measuring device of the Fabry-P erot resonator type. The invention likewise concerns a measuring device manufactured by means of the method. The measuring device is particularly intended for measurement of the pressures inside engine cylinders and comprises a cavity and a first part and a second part, said two parts sandwiching the cavity between them. At least the first part, which consists of silicon, supports a spacer layer of silicon dioxide formed through thermal oxidation. The spacer layer which is partially removed through etching, is joined to the second part using the technique known as direct bonding (SDB).
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