Apparatus and method for inspection of a patterned object by comparison thereof to a reference
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United States of America Patent
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Apr 8, 1997
Grant Date -
N/A
app pub date -
Nov 27, 1991
filing date -
Dec 4, 1990
priority date (Note) -
In Force
status (Latency Note)
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Abstract
An inspection method including the steps of providing a patterned object to be inspected and compared with a reference, inspecting the patterned object and providing an output of information relating to the visual characteristics of the patterned object, comparing binary level information relating to the visual characteristics of the patterned object to binary level information relating to the visual characteristics of the reference, and comparing gray level information relating to the visual characteristics of the patterned object to gray level information relating to the visual characteristics of the reference.
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Cited Art Landscape
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