Electrostatic ultrasonic transducer
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United States of America Patent
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Apr 8, 1997
Grant Date -
N/A
app pub date -
Oct 21, 1994
filing date -
Oct 21, 1994
priority date (Note) -
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Abstract
An electrostatic ultrasonic transducer formed on a semiconductor substrate by micro-machining wherein the transducer includes a silicon nitride membrane supported above the surface of the substrate by insulating supports; and the substrate and membrane define the electrodes of the transducer.
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