Method and apparatus for manufacturing a diffraction grating zone plate
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United States of America Patent
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Apr 22, 1997
Grant Date -
N/A
app pub date -
Jun 29, 1995
filing date -
Jun 30, 1994
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
An apparatus of this invention has an objective lens for guiding an exposure beam emitted by a light source toward a first region on a rotary table, a lighting light source for irradiating lighting light in the direction of the first region via the objective lens, an image pickup device for picking up an image from the first region obtained via the objective lens, modulation means for changing the propagating direction of the exposure beam, and a controller for controlling the modulation means on the basis of a signal input from the image pickup device.
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