Processing apparatus with collimator exchange device
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United States of America Patent
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-
Apr 29, 1997
Grant Date -
N/A
app pub date -
Jun 6, 1995
filing date -
Jun 8, 1994
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
The sputtering system of the present invention includes a spare collimator storage chamber for accommodating one or more spare collimators and a processing chamber, which are provided in one-piece or in communication with each other through a gate valve. A used collimator in the processing chamber is quickly and readily replaced with a new collimator stored in the spare collimator storage chamber by a collimator exchanging device without exposing the interior of the processing chamber to atmospheric air.
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