Optical inspection system and method for detecting flaws on a diffractive surface
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United States of America Patent
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Apr 29, 1997
Grant Date -
N/A
app pub date -
Jul 10, 1995
filing date -
Jul 10, 1995
priority date (Note) -
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Abstract
An improved optical inspection system for detecting flaws on a diffractive surface containing surface patterns includes: an ultraviolet illumination means for illuminating a region on the diffractive surface to generate a scattered intensity distribution in response to either a flaw or a surface pattern; means for detecting the intensity level of the scattered intensity distribution at a plurality of locations about the diffractive surface; means for establishing a minimum detected intensity level; means, responsive to the minimum detected intensity level, for indicating the absence of a flaw on the illuminated region of the diffractive surface when the minimum detected intensity level is below a threshold intensity level and for indicating the presence of a flaw on the illuminated region of the diffractive surface when the minimum detected intensity level exceeds the threshold intensity level; and means for moving the diffractive surface to generate a scan pattern on the diffractive surface to inspect the entire surface.
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