Method of making a field emission electron source with random micro-tip structures
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United States of America Patent
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May 13, 1997
Grant Date -
N/A
app pub date -
Apr 24, 1995
filing date -
Apr 24, 1995
priority date (Note) -
Expired
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Abstract
A system and method is available for fabricating a field emitter device, where in an emitter material, such as copper, is deposited over a resistive layer which has been deposited upon a substrate. Two ion beam sources are utilized. The first ion beam source is directed at a target material, such as molybdenum, for sputtering molybdenum onto the emitter material. The second ion beam source is utilized to etch the emitter material to produce cones or micro-tips. A low work function material, such as amorphous diamond, is then deposited over the micro-tips.
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