Electrostatically-controlled cantilever apparatus for continuous tuning of the resonance wavelength of a fabry-perot cavity
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United States of America Patent
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May 13, 1997
Grant Date -
N/A
app pub date -
Oct 13, 1995
filing date -
Oct 13, 1995
priority date (Note) -
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Abstract
An electrostatically controlled cantilever apparatus for continuous tuning of the resonance wavelength of a Fabry-Perot cavity is disclosed. A resonant cavity is formed between two distributed Bragg reflector (DBR) mirrors. The top reflector is composed of a movable top DBR supported in a freely suspended cantilever, a variable-thickness air spacer layer and a fixed DBR. The bottom reflector is fixed on the substrate. By applying a tuning voltage to create electrostatic attraction, the cantilever may be deflected towards the substrate, thereby changing the thickness of the air spacer layer and consequently the resonant wavelength of the Fabry-Perot cavity.
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