Method and apparatus for aerial image analyzer
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United States of America Patent
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May 20, 1997
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N/A
app pub date -
Mar 9, 1994
filing date -
Mar 9, 1994
priority date (Note) -
Expired
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Abstract
A method and apparatus to analyze the aerial image of an optical system using a subwavelength slit. A slit configuration yields a higher signal-to-noise ratio than that achievable with a round aperture. The slit also allows the polarization of the aerial image to be analyzed. In an alternative embodiment a tunneling slit is used. The tunneling slit comprises an optically transparent ridge-like structure mounted to a substrate, the combined structure covered by a thin, planar metal film.
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