Method for manufacturing chalcopyrite film
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United States of America Patent
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-
May 27, 1997
Grant Date -
N/A
app pub date -
Apr 11, 1995
filing date -
Apr 18, 1994
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A method for manufacturing an ABC.sub.2 chalcopyrite film (wherein A represents Cu or Ag, B represents In, Ga or Al, C represents S, Se or Te) comprises; a first step of forming a film of a composition of ABC.sub.2 containing element A in excess; a second step of exposing the film formed in the first step to a flux or gas containing element B and C, or to a gas or flux containing element A, B and C but containing element B in excess; and monitoring an electrical or optical property of the film in order to determine an end point of the second step where the electrical or optical property of the film demonstrates a specific change.
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