Cantilever pressure transducer
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United States of America Patent
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-
May 27, 1997
Issued Date -
N/A
app pub date -
Jun 10, 1994
filing date -
Jun 4, 1993
priority date (Note) -
Expired
status (Latency Note)
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Abstract
Micromachined cantilever pressure transducers, which work both as microphones and as microspeakers, are disclosed. These devices are made possible by novel methods for producing flat, thin film multilayer or polymeric cantilevers.
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