Semiconductor manufacturing apparatus
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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Jun 3, 1997
Grant Date -
N/A
app pub date -
May 3, 1995
filing date -
May 13, 1994
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
An apparatus for exposing a substrate chucked on a substrate holder includes a substrate stocking device for stocking a plurality of substrates, a substrate conveying system for picking up the substrate from the substrate stocking device and conveying the substrate to the substrate, holder while chucking a portion of a rear surface of the substrate and a cleaning system for cleaning the rear surface of the substrate.
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