Method for the preparation of a pattern overlay accuracy-measuring mark
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United States of America Patent
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Jun 3, 1997
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N/A
app pub date -
May 29, 1996
filing date -
Oct 15, 1993
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Abstract
Method for the preparation of pattern overlay accuracy-measuring mark consisting of an inner box and an outer box. The method is characterized in that a groove is formed along the inside boundary line of the outer box, so as to enlarge step thereat. The enlarged step prevents inaccuracy in defining the boundary line, of the outer box whose inaccuracy is mainly attributed to smooth flow which occurs at the boundary line as a metal layer is coated over the outer box. Accordingly, the method can easily define the boundary line and thus, definitely measure the overlay accuracy.
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