Apparatus for detecting and aligning a substrate
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United States of America Patent
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Jun 10, 1997
Issued Date -
N/A
app pub date -
Feb 15, 1995
filing date -
Jul 29, 1992
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
An apparatus according to the present invention includes a cassette in which a plurality of substrates are stored, a contact guide member provided to face a side surface of the cassette, and pressing end surfaces of substrates stored in the cassette, an alignment device for moving the contact guide member to approach the cassette, and pressing the contact guide member against the end surfaces of the substrates in the cassette, thereby aligning the substrates all at one pressing time, and detectors, provided for the alignment device at positions corresponding to spaces of substrates held in the cassette, in the same or multiple number of the spaces for holding substrates, for detecting whether or not a substrate is present in each of the spaces for holding the substrates of the cassette.
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