Treatment system and treatment apparatus
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United States of America Patent
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-
Jun 17, 1997
Issued Date -
N/A
app pub date -
Sep 30, 1994
filing date -
Jul 15, 1992
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A treatment system is disclosed, which has a treatment apparatus for performing a predetermined treatment for a planar workpiece contained in a carrier, and an first air-tight carrier storage chamber for storing the carrier. The treatment apparatus may also have an air-tight second carrier storage chamber. An inert gas supply and exhaust are connected to each of the treatment apparatus, the first carrier storage chamber, and the second carrier storage chamber. A valve device is provided for the inert gas supply and exhaust.
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