US Patent No: 5,645,391

Number of patents in Portfolio can not be more than 2000

Substrate transfer apparatus, and method of transferring substrates

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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In a vertical heat treatment apparatus, a transfer apparatus is used to transfer a wafer between a wafer carrier and a wafer boat. The transfer apparatus comprises a base unit, a fork, three non-contact type sensors, and a main controller. The base unit can move between a first position at which to transfer the wafer to and from the wafer carrier and a second position at which to transfer the wafer to and from the wafer boat. The fork can move back and forth with respect to the base unit, for supporting the wafer. The non-contact type sensors are mounted on the fork, for detecting the position of the wafer. The main controller controls the base unit and the fork in accordance with the data detected by the non-contact type sensors.

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Patent Owner(s)

Patent OwnerAddressTotal Patents
TOKYO ELECTRON LIMITEDTOKYO5465

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ohsawa, Tetu Sagamihara, JP 4 64
Tateyama, Kiyohisa Kumamoto-Ken, JP 76 1704

Cited Art Landscape

Patent Info (Count) # Cites Year
 
TOKYO ELECTRON LIMITED (3)
4,941,800 Transfer apparatus for plate-like member 3 1988
5,017,082 Handling apparatus 3 1990
5,405,230 Load-lock unit and wafer transfer system 40 1992
 
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC. (2)
4,744,709 Low deflection force sensitive pick 10 1987
4,836,733 Wafer transfer system 166 1987
 
ASM AMERICA, INC. (1)
5,044,752 Apparatus and process for positioning wafers in receiving devices 58 1989
 
AVIZA TECHNOLOGY, INC. (1)
4,770,590 Method and apparatus for transferring wafers between cassettes and a boat 183 1986
 
CANON KABUSHIKI KAISHA (1)
5,350,269 Work pick-up apparatus 21 1992
 
CYBEQ SYSTEMS, INC. (1)
4,458,152 Precision specular proximity detector and article handing apparatus employing same 23 1982
 
Photo Acoustic Technology, Inc. (1)
4,718,023 Ultrasonic apparatus for positioning a robot hand 14 1984
 
TET TECHNO INVESTMENT TRUST SETTLEMENT, A CORP. OF PRINCEIPALITY OF LIECHTENSTEIN (1)
5,133,635 Method and apparatus for holding and conveying platelike substrates 73 1990
 
TRW Vehicle Safety Systems Inc. (1)
5,178,407 Folded air bag 46 1991

Patent Citation Ranking

Forward Cite Landscape

Patent Info (Count) # Cites Year
 
APPLIED MATERIALS, INC. (4)
6,082,950 Front end wafer staging with wafer cassette turntables and on-the-fly wafer center finding 54 1996
6,709,218 Robot blade for semiconductor processing equipment 6 1999
6,685,422 Pneumatically actuated flexure gripper for wafer handling robots 14 2001
7,655,092 Tandem process chamber 2 2003
 
CROSSING AUTOMATION, INC. (4)
7,217,076 Semiconductor material handling system 4 2002
7,066,707 Wafer engine 8 2002
7,293,950 Universal modular wafer transport system 12 2002
7,648,327 Wafer engine 1 2005
 
TOKYO ELECTRON LIMITED (4)
5,857,848 Transfer apparatus and vertical heat-processing system using the same 16 1997
6,032,083 Substrate transfer apparatus and heat treatment system using the same 15 1997
6,144,926 Method of sensing access positions of arm 11 1998
8,545,158 Loading unit and processing system 0 2012
 
JAPAN DISPLAY CENTRAL INC. (3)
5,740,059 Method of transporting substrates and apparatus for transporting substrates 25 1996
6,327,512 Method and apparatus using positional data detected in a non-contact manner to transfer a substrate from a first position to a second position 4 1998
6,459,947 Apparatus using positional data detected in a non-contact manner to transfer a substantially rectangular substrate from a first position to a second position 6 2001
 
LEHIGHTON ELECTRONICS, INC. (3)
6,205,852 Method and apparatus for testing of sheet material 2 1999
6,443,002 Method and apparatus for testing of sheet material 2 2001
8,207,748 Device and handling system for measurement of mobility and sheet charge density 0 2005
 
BROOKS AUTOMATION, INC. (2)
5,970,621 Semiconductor wafer cassette positioning and detection mechanism 16 1999
7,134,825 Device for handling substrates inside and outside a clean room 3 2000
 
KABUSHIKI KAISHA YASKAWA DENKI (2)
7,008,884 Transfer robot and inspection method for thin substrate 1 2001
6,927,181 Transfer robot and inspection method for thin substrate 4 2004
 
ADE OPTICAL SYSTEMS CORPORATION (1)
5,988,971 Wafer transfer robot 32 1997
 
BROOKS AUTOMATION GMBH (1)
6,419,439 Indexer for magazine shelves of a magazine and wafer-shaped objects contained therein 5 1996
 
DAINIPPON SCREEN MFG. CO., LTD. (1)
5,906,469 Apparatus and method for detecting and conveying substrates in cassette 42 1996
 
GENMARK AUTOMATION, INC. (1)
6,085,125 Prealigner and planarity teaching station 17 1998
 
HAND HELD PRODUCTS, INC. (1)
6,969,003 Method and apparatus for extending operating range of bar code scanner 126 2002
 
HIROTEC CORPORATION (1)
7,575,408 Work conveying method and conveying apparatus employing the conveying method 3 2006
 
INTERNATIONAL BUSINESS MACHINES CORPORATION (1)
6,247,368 CMP wet application wafer sensor 1 1999
 
LAPIS SEMICONDUCTOR CO., LTD. (1)
7,317,311 Wafer handling checker 0 2003
 
MICROTOOL, INC. (1)
6,532,403 Robot alignment system and method 14 2001
 
R. ROULKE DEVELOPMENT COMPANY, LLC (1)
6,690,993 Reticle storage system 50 2001
 
SAMSUNG ELECTRONICS CO., LTD. (1)
7,275,905 Method and device for controlling position of cassette in semiconductor manufacturing equipment 1 2005
 
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. (1)
6,113,165 Self-sensing wafer holder and method of using 29 1998
 
TEXAS INSTRUMENTS INCORPORATED (1)
6,718,227 System and method for determining a position error in a wafer handling device 4 2000
 
Other [Check patent profile for assignment information] (1)
8,428,706 Sheet conductance/resistance measurement system 0 2006