Beam delivery apparatus and method for interferometry using rotatable polarization chucks

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 5648848
SERIAL NO

08381734

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

A method of providing a beam having precisely orthogonally polarized components includes generating a beam with substantially orthogonally polarized components, splitting the beam to separate the components to separate paths, projecting each component into a respective polarization preserving optical fiber (PPF) or polarizing fiber, recombining the components output from the fibers into a single beam, and transmitting the single beam to an interferometer. The PPFs are rotationally adjustable at their output ends to provide precise orthogonality in the resulting beam.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

  • NIKON PRECISION INC.

International Classification(s)

  • [Classification Symbol]
  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Aiyer, Arun A Fremont, CA 14 416

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation