Method of micromachining electromagnetically actuated current switches with polyimide reinforcement seals, and switches produced thereby
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United States of America Patent
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Jul 29, 1997
Issued Date -
N/A
app pub date -
Apr 1, 1996
filing date -
Dec 20, 1993
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
An insulating layer with at least one via is provided over a metal plate. A sacrificial layer is applied over a portion of the insulating layer so that the sacrificial layer extends into the via. A metal bridge having at least one opening is provided over a portion of the sacrificial layer and a portion of the insulating layer so that the metal bridge extends over the via and the opening is situated adjacent a portion of the sacrificial layer. A reinforcing seal layer with a well is provided over the metal bridge so that the well is situated adjacent to at least a portion of the opening. The sacrificial layer is then removed.
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