Vacuum maintenance device for high vacuum chambers

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United States of America Patent

PATENT NO 5655886
SERIAL NO

08469512

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Abstract

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An ion pump permits the continuous evacuation of a small-envelope vacuum chamber while drawing a relatively small amount of power (micro watts). In a preferred embodiment, the present ion pump, due to its small size and integration within the vacuum chamber, enables the device in which the vacuum chamber is incorporated to be portable and to retain its original dimensions.

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Patent Owner(s)

Patent OwnerAddress
SEMIX INC4160 TECHNOLOGY DR FREMONT CA 94538

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Alderson, Richard K Phoenix, AZ 6 174

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