Importance

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Abstract

A liquid applying apparatus includes a rotary member having a disk table in which a substrate to be applied with liquid is placed; a cover member movable above the disk table and operable to define a closed space in combination with the disk table; an elevating mechanism which elevates up and down the cover member; a sealing arrangement provided between the disk table and the cover member to seal the closed space, the sealing arrangement including: a resilient sealing ring having a specified sectional size; a ring accommodation annular groove formed in either a top surface of a periphery of the disk table or an underside surface of a periphery of the cover member, the ring accommodation annular groove having a sectional size greater than the sectional size of the sealing ring and being operable to accommodate the sealing ring; a ring pressing annular ridge formed on either a top surface of a periphery of the disk table or an underside surface of a periphery of the cover member, the ring pressing annular ridge having a sectional size smaller than the ring accommodation annular groove, and being engageable with the ring accommodation annular groove, and coming into contact with the sealing ring to press the sealing ring against the ring accommodation annular groove when the cover member is combined with the disk table.

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First Claim