Resistance temperature sensor
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United States of America Patent
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-
Aug 12, 1997
Grant Date -
N/A
app pub date -
Feb 15, 1994
filing date -
Feb 18, 1993
priority date (Note) -
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Abstract
In order to improve uniformity of temperature distribution, despite heat which is generated in a resistance circuit and flows into a support part thereby causing a high output, a resistance circuit is provided with first, second and third regions having different resistance values so that the third region which is in proximity to the support part has the highest resistance value.
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