Modular vacuum system for the treatment of disk-shaped workpieces
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United States of America Patent
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-
Aug 19, 1997
Grant Date -
N/A
app pub date -
Feb 15, 1995
filing date -
May 5, 1994
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
Modular vacuum system includes functional units arranged in tandem to form two parallel transport paths which connect at one end of the system. Each unit includes a housing milled from a single block of metal having external walls, an internal wall, and side-by-side openings which align with side-by-side openings in an adjacent unit.
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Cited Art Landscape
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