Method of forming coating film and apparatus therefor
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United States of America Patent
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Aug 19, 1997
Grant Date -
N/A
app pub date -
Mar 25, 1994
filing date -
Mar 25, 1993
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
An apparatus for forming a coating film, comprises a spin chuck for supporting a substrate with one surface facing upward and rotating the substrate about a vertical axis, a first nozzle for supplying a solvent of a coating solution on the substrate, and a second nozzle for supplying the coating solution on a central portion of the substrate. The first and second nozzles are supported by a head such that the supported nozzle moves between a dropping position above the substrate and a waiting position offset from the substrate. The solvent and coating solution are diffused along the surface of the substrate by rotating the spin chuck.
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