Method of bonding an aluminum wire to an intergrated circuit bond pad

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United States of America Patent

PATENT NO 5661081
SERIAL NO

08316083

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Abstract

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A process for manufacturing bonding pad adapted for use with an aluminum wire that resists stresses that would otherwise peel the pad from the substrate. The pad has a polysilicon layer adhered to an insulating layer on a semiconductor substrate, a overlying refractory metal polycide layer, a second polysilicon layer, a refractory metal layer, and a thick aluminum alloy bonding pad.

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Patent Owner(s)

Patent OwnerAddress
UNITED MICROELECTRONICS CORPORATIONNO 3 LI-HSIN RD II SCIENCE-BASED INDUSTRIAL PARK HSINCHU

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Anchor Chu-Tung, TW 39 441
Chien, Sun-Chieh Hsin-Chu, TW 80 964
Hong, Gary Hsin-Chu, TW 225 4351
Hsue, Chen-Chiu Hsin-Chu, TW 107 1389

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