US Patent No: 5,661,591

Number of patents in Portfolio can not be more than 2000

Optical switch having an analog beam for steering light

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Abstract

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A spatial light modulator (40,70,80,90,130) operable in the analog mode for light beam steering or scanning applications. A deflectable mirror (42, 72) and which may be hexagonal (92, 132) is supported by a torsion hinge (44,86,94) ends along a torsion axis. A plurality of flexure hinges (48,82,106) are provided to support the ends of the mirror (42,72,92,132) and provide a restoration force. The combination of the torsion hinges and the flexure hinges realizes a deflectable pixel that is operable in the linear range for a large range of address voltages. The flexure hinges also maintain a flat undeflected state when no address voltage is applied, and prevent the pixel from collapsing. The pixel may be reinforced, such as about its perimeter (74) to ensure mirror flatness and prevent warping, even during extreme deflections of the mirror. The pixel is electrostatically deflected by applying an address voltage to an underlying address electrode (60,96,98). The hexagonal mirrors (92,132) allow a tightly packed mirror array, and have a closely circular surface area so as to efficiently reflect a light beam of circular cross section, such as a light beam from fiber optics.

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First Claim

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Patent Owner(s)

Patent OwnerAddressTotal Patents
TEXAS INSTRUMENTS INCORPORATEDDALLAS, TX16481

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Boysel, Robert Mark Hopewell Jct, NY 6 388
Congdon, Philip A Dallas, TX 9 648
Florence, James M Richardson, TX 44 3769
Lin, Tsen-Hwang Dallas, TX 30 2301
Magel, Gregory A Dallas, TX 25 1150

Cited Art Landscape

Patent Info (Count) # Cites Year
 
TEXAS INSTRUMENTS INCORPORATED (1)
* 5,489,952 Method and device for multi-format television 349 1993
* Cited By Examiner

Patent Citation Ranking

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Patent Info (Count) # Cites Year
 
Other [Check patent profile for assignment information] (4)
* 2004/0240,033 High fill ratio reflective spatial light modulator with hidden hinge 0 2004
* 2005/0264,866 Optical modulator, optical modulator manufacturing method, light information processing apparatus including optical modulator, image formation apparatus including optical modulator, and image projection and display apparatus including optical modulator 0 2005
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* 8,610,997 Micro-electromechanical device 0 2011
 
Light Field Corporation (1)
* 2013/0194,651 Full Color Phase-Only Spatial Light Modulator for Holographic Video Display System 0 2013
 
COMMSCOPE TECHNOLOGIES LLC (6)
6,316,282 Method of etching a wafer layer using multiple layers of the same photoresistant material 1 1999
6,242,363 Method of etching a wafer layer using a sacrificial wall to form vertical sidewall 15 1999
6,229,640 Microelectromechanical optical switch and method of manufacture thereof 76 1999
6,682,871 Microelectromechanical optical switch and method of manufacture thereof 0 2001
6,801,682 Latching apparatus for a MEMS optical switch 4 2001
6,469,361 Semiconductor wafer 0 2001
 
Mirrorcle Technologies, Inc. (1)
8,427,657 Device for optical imaging, tracking, and position measurement with a scanning MEMS mirror 2 2012
 
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V. (1)
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SOLUS MICRO TECHNOLOGIES, INC. (1)
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SAMSUNG ELECTRONICS CO., LTD. (1)
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Capella Photonics, Inc. (1)
7,209,274 High fill-factor bulk silicon mirrors 16 2003
 
FUJI PHOTO FILM CO., LTD. (1)
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ITUS CORPORATION (1)
* 9,007,676 MEMS electrostatic display 0 2012
 
Hwa Hong Industrial Corp. (1)
* 2008/0304,169 Lens actuating apparatus 0 2008
 
The Regents of the University of California (2)
* 8,830,556 Metamaterials 1 2011
* 2011/0317,275 METAMATERIALS 3 2011
 
HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P. (5)
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* 2006/0227,404 Light modulator device 3 2005
7,471,441 Flexures 0 2006
* 2008/0101,748 MEMS DEVICE LEVER 2 2006
 
LUCENT TECHNOLOGIES INC. (2)
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7,277,173 Active optical alignment using MEMS mirrors 6 2003
 
FINISAR CORPORATION (1)
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DRNC HOLDINGS, INC. (1)
* 6,473,221 Galvano-mirror and method of making the same 7 2001
 
RICOH COMPANY, LTD. (2)
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7,166,486 Optical modulator, optical modulator manufacturing method, light information processing apparatus including optical modulator, image formation apparatus including optical modulator, and image projection and display apparatus including optical modulator 9 2005
 
Exajoule, LLC (3)
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7,518,781 Micromirror systems with electrodes configured for sequential mirror attraction 2 2006
 
DENSO CORPORATION (1)
* 6,795,603 Optical switch 6 2002
 
ROBERT BOSCH GMBH (3)
6,449,079 Deflectable micro-mirror 29 2000
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OMM, INC. (1)
6,567,574 Modular three-dimensional optical switch 44 2000
 
INTEL CORPORATION (1)
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VENTURE LENDING & LEASING IV, INC. (32)
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* 6,873,450 Micromirrors with mechanisms for enhancing coupling of the micromirrors with electrostatic fields 22 2003
* 7,019,376 Micromirror array device with a small pitch size 14 2003
* 2005/0018,091 Micromirror array device with a small pitch size 1 2003
7,300,162 Projection display 5 2004
7,196,740 Projection TV with improved micromirror array 7 2004
7,172,296 Projection display 9 2004
7,167,297 Micromirror array 4 2004
7,023,606 Micromirror array for projection TV 8 2004
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7,012,731 Packaged micromirror array for a projection display 4 2004
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* 2005/0030,490 Projection display 4 2004
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* 2004/0223,088 Projection TV with improved micromirror array 26 2004
* 2004/0223,240 Micromirror array 24 2004
* 2004/0218,293 Packaged micromirror array for a projection display 27 2004
* 2004/0218,149 Projection display 24 2004
* 7,345,806 Method and apparatus for characterizing microelectromechanical devices on wafers 5 2004
7,212,359 Color rendering of illumination light in display systems 4 2004
7,131,762 Color rendering of illumination light in display systems 6 2004
* 2005/0024,733 Color rendering of illumination light in display systems 0 2004
* 2005/0024,734 Color rendering of illumination light in display systems 0 2004
7,262,817 Rear projection TV with improved micromirror array 11 2004
* 2005/0007,557 Rear projection TV with improved micromirror array 3 2004
6,974,713 Micromirrors with mechanisms for enhancing coupling of the micromirrors with electrostatic fields 61 2005
* 2005/0190,430 Micromirrors with mechanisms for enhancing coupling of the micromirrors with electrostatic fields 6 2005
7,671,428 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates 1 2005
7,655,492 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates 0 2005
7,573,111 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates 4 2005
7,286,278 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates 4 2005
 
NEOPHOTONICS CORPORATION (4)
* 6,600,587 Surface micromachined optical system with reinforced mirror microstructure 16 2001
6,791,730 Surface micromachined optical system with reinforced mirror microstructure 4 2003
6,778,305 Surface micromachined optical system with reinforced mirror microstructure 1 2003
6,778,306 Surface micromachined optical system with reinforced mirror microstructure 71 2003
 
SARNOFF CORPORATION (1)
* 6,535,091 Microelectronic mechanical systems (MEMS) switch and method of fabrication 13 2001
 
MICROVISION, INC. (7)
* 6,285,489 Frequency tunable resonant scanner with auxiliary arms 60 1999
6,535,325 Frequency tunable resonant scanner with auxiliary arms 26 2001
6,654,158 Frequency tunable resonant scanner with auxiliary arms 25 2002
6,882,462 Resonant scanner with asymmetric mass distribution 16 2003
* 2004/0085,617 Frequency tunable resonant scanner with auxiliary arms 6 2003
7,516,896 Frequency tunable resonant scanner with auxiliary arms 3 2005
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TEXAS INSTRUMENTS INCORPORATED (10)
* 5,943,157 Spatial light modulator having improved contrast ratio 45 1998
* 6,028,690 Reduced micromirror mirror gaps for improved contrast ratio 310 1998
* 6,147,790 Spring-ring micromechanical device 254 1999
* 6,038,056 Spatial light modulator having improved contrast ratio 276 1999
* 6,469,821 Micromirror structures for orthogonal illumination 20 2000
7,362,493 Micromirror and post arrangements on substrates 3 2005
7,075,702 Micromirror and post arrangements on substrates 29 2005
7,411,717 Micromirror device 2 2005
* 2006/0033,977 Micromirror device 0 2005
* 7,359,107 Analog MEMS with non-linear support 0 2006
 
UTAH STATE UNIVERSITY RESEARCH FOUNDATION (3)
* 8,542,450 Kinematic optic mount 1 2011
* 2012/0200,947 Kinematic Optic Mount 1 2011
8,792,191 Kinematic optic mount 0 2013
 
NORTEL NETWORKS LIMITED (1)
6,426,013 Method for fabricating micromachined members coupled for relative rotation 28 1999
 
SEIKO EPSON CORPORATION (3)
* 6,271,955 Method of manufacturing spatial light modulator and electronic device employing it 17 2000
6,452,712 Method of manufacturing spatial light modulator and electronic device employing it 108 2001
6,650,461 Method of manufacturing spatial light modulator and electronic device employing it 41 2002
 
Wah Hong Industrial Corp. (1)
* 7,489,459 Lens actuating apparatus 0 2008
 
Thomas Swan & Co. Ltd. (1)
8,937,759 Optical processing 0 2012
 
MICRONIC LASER SYSTEMS AB (5)
* 6,373,619 Pattern generator with improved address resolution 27 2000
* 2002/0122,237 Method and apparatus for spatial light modulation 11 2001
6,987,599 Pattern generator mirror configurations 5 2003
* 2003/0202,233 Pattern generator mirror configurations 2 2003
7,034,986 Pattern generator mirror configurations 1 2005
 
Miradia Inc. (46)
* 2004/0069,742 Fabrication of a reflective spatial light modulator 4 2003
* 2004/0004,753 Architecture of a reflective spatial light modulator 55 2003
* 2003/0234,994 Reflective spatial light modulator 13 2003
7,026,695 Method and apparatus to reduce parasitic forces in electro-mechanical systems 8 2003
* 7,118,234 Reflective spatial light modulator 5 2004
7,092,140 Architecture of a reflective spatial light modulator 9 2004
7,022,245 Fabrication of a reflective spatial light modulator 11 2004
* 2004/0159,631 Fabrication of a reflective spatial light modulator 0 2004
* 2004/0145,822 Reflective spatial light modulator 0 2004
* 2004/0145,795 Architecture of a reflective spatial light modulator 0 2004
7,449,284 Method and structure for fabricating mechanical mirror structures using backside alignment techniques 1 2004
* 2005/0255,666 Method and structure for aligning mechanical based device to integrated circuits 20 2004
7,034,984 Fabrication of a high fill ratio reflective spatial light modulator with hidden hinge 34 2004
6,992,810 High fill ratio reflective spatial light modulator with hidden hinge 36 2004
7,042,619 Mirror structure with single crystal silicon cross-member 22 2004
7,068,417 Method and apparatus for a reflective spatial light modulator with a flexible pedestal 26 2004
* 2006/0023,286 Method and apparatus for a reflective spatial light modulator with a flexible pedestal 0 2004
7,206,110 Memory cell dual protection 4 2004
* 2005/0174,628 Memory cell dual protection 4 2004
7,172,921 Method and structure for forming an integrated spatial light modulator 5 2005
* 2006/0148,121 Method and structure for forming an integrated spatial light modulator 0 2005
7,199,918 Electrical contact method and structure for deflection devices formed in an array configuration 0 2005
7,142,349 Method and structure for reducing parasitic influences of deflection devices on spatial light modulators 2 2005
* 2006/0152,794 Method and structure for reducing parasitic influences of deflection devices on spatial light modulators 0 2005
* 2006/0152,795 Electrical contact method and structure for deflection devices formed in an array configuration 8 2005
7,298,539 Co-planar surface and torsion device mirror structure and method of manufacture for optical displays 1 2005
7,202,989 Method and device for fabricating a release structure to facilitate bonding of mirror devices onto a substrate 2 2005
* 2006/0274,397 Co-planar surface and torsion device mirror structure and method of manufacture for optical displays 0 2005
7,190,508 Method and structure of patterning landing pad structures for spatial light modulators 1 2005
7,184,195 Method and structure reducing parasitic influences of deflection devices in an integrated spatial light modulator 59 2005
7,502,158 Method and structure for high fill factor spatial light modulator with integrated spacer layer 0 2005
* 2006/0082,862 High fill ratio reflective spatial light modulator with hidden hinge 1 2005
7,369,297 Mirror structure with single crystal silicon cross-member 2 2005
* 2006/0087,717 Mirror structure with single crystal silicon cross-member 2 2005
* 2006/0131,262 Fabrication of a reflective spatial light modulator 0 2005
7,233,428 Method and apparatus for a reflective spatial light modulator with a flexible pedestal 4 2006
* 2006/0187,525 Method and apparatus for a reflective spatial light modulator with a flexible pedestal 0 2006
7,670,880 Method and structure for forming an integrated spatial light modulator 1 2007
7,382,519 Method and device for fabricating a release structure to facilitate bonding of mirror devices onto a substrate 1 2007
7,570,416 Method and apparatus for a reflective spatial light modulator with a flexible pedestal 0 2007
* 2008/0055,709 METHOD AND APPARATUS FOR A REFLECTIVE SPATIAL LIGHT MODULATOR WITH A FLEXIBLE PEDESTAL 0 2007
7,428,094 Fabrication of a high fill ratio reflective spatial light modulator with hidden hinge 0 2007
* 2008/0062,503 Fabrication of a high fill ratio reflective spatial light modulator with hidden hinge 0 2007
8,207,004 Method and structure for forming a gyroscope and accelerometer 3 2009
* 2010/0109,102 Method and structure for forming a gyroscope and accelerometer 28 2009
8,530,259 Method and structure for forming a gyroscope and accelerometer 0 2012
 
OPTICAL MICRO-MACHINES, INC. (1)
6,556,741 MEMS optical switch with torsional hinge and method of fabrication thereof 8 2000
 
Spatial Photonics, Inc. (7)
7,391,556 Ultra-thin display system 0 2006
* 2008/0024,857 Ultra-Thin Display System 0 2006
7,391,554 High fill-ratio mirror-based spatial light modulator 1 2006
* 2008/0062,502 HIGH FILL-RATIO MIRROR-BASED SPATIAL LIGHT MODULATOR 0 2006
7,388,708 Spatial light modulator multi-layer mirror plate 4 2006
* 2007/0053,052 Spatial Light Modulator Multi-layer Mirror Plate 0 2006
7,586,669 Non-contact micro mirrors 3 2006
 
Adriatic Research Institute (4)
7,295,726 Gimbal-less micro-electro-mechanical-system tip-tilt and tip-tilt-piston actuators and a method for forming the same 16 2004
7,428,353 MEMS device control with filtered voltage signal shaping 13 2006
8,043,513 Gimbal-less micro-electro-mechanical-system tip-tilt and tip-tilt-piston actuators and a method for forming the same 2 2007
* 2008/0061,026 GIMBAL-LESS MICRO-ELECTRO-MECHANICAL-SYSTEM TIP-TILT AND TIP-TILT-PISTON ACTUATORS AND A METHOD FOR FORMING THE SAME 10 2007
 
QUALCOMM MEMS TECHNOLOGIES, INC. (52)
7,476,327 Method of manufacture for microelectromechanical devices 55 2004
7,893,919 Display region architectures 21 2005
* 2006/0066,640 Display region architectures 76 2005
7,289,259 Conductive bus structure for interferometric modulator array 83 2005
7,302,157 System and method for multi-level brightness in interferometric modulation 65 2005
7,321,456 Method and device for corner interferometric modulation 61 2005
7,372,613 Method and device for multistate interferometric light modulation 91 2005
7,420,725 Device having a conductive light absorbing mask and method for fabricating same 67 2005
7,719,500 Reflective display pixels arranged in non-rectangular arrays 57 2005
7,527,995 Method of making prestructure for MEMS systems 45 2005
RE42119 Microelectrochemical systems device and method for fabricating same 14 2005
8,008,736 Analog interferometric modulator device 11 2005
7,554,714 Device and method for manipulation of thermal response in a modulator 41 2005
7,304,784 Reflective display device having viewable display on both sides 62 2005
7,567,373 System and method for micro-electromechanical operation of an interferometric modulator 46 2005
7,936,497 MEMS device having deformable membrane characterized by mechanical persistence 14 2005
7,630,119 Apparatus and method for reducing slippage between structures in an interferometric modulator 33 2005
7,564,612 Photonic MEMS and structures 91 2005
7,327,510 Process for modifying offset voltage characteristics of an interferometric modulator 238 2005
* 2006/0066,935 Process for modifying offset voltage characteristics of an interferometric modulator 11 2005
7,684,104 MEMS using filler material and method 17 2005
7,236,284 Photonic MEMS and structures 111 2005
7,916,980 Interconnect structure for MEMS device 10 2006
7,550,810 MEMS device having a layer movable at asymmetric rates 46 2006
7,532,377 Movable micro-electromechanical device 58 2006
* 2007/0268,201 Back-to-back displays 15 2006
7,372,619 Display device having a movable structure for modulating light and method thereof 101 2006
7,649,671 Analog interferometric modulator device with electrostatic actuation and release 31 2006
7,471,442 Method and apparatus for low range bit depth enhancements for MEMS display architectures 12 2006
7,835,061 Support structures for free-standing electromechanical devices 17 2006
7,385,744 Support structure for free-standing MEMS device and methods for forming the same 60 2006
7,527,998 Method of manufacturing MEMS devices providing air gap control 19 2006
7,830,586 Transparent thin films 33 2006
7,554,711 MEMS devices with stiction bumps 64 2006
7,545,552 Sacrificial spacer process and resultant structure for MEMS support structure 11 2006
7,642,110 Method for fabricating a structure for a microelectromechanical systems (MEMS) device 24 2007
7,719,752 MEMS structures, methods of fabricating MEMS components on separate substrates and assembly of same 8 2007
8,085,458 Diffusion barrier layer for MEMS devices 0 2009
7,830,589 Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator 7 2009
8,928,967 Method and device for modulating light 0 2010
9,110,289 Device for modulating light with multiple electrodes 0 2011
8,971,675 Interconnect structure for MEMS device 0 2011
9,134,527 Pixel via and methods of forming the same 0 2011
8,963,159 Pixel via and methods of forming the same 0 2011
8,817,357 Mechanical layer and methods of forming the same 1 2011
8,964,280 Method of manufacturing MEMS devices providing air gap control 0 2012
8,970,939 Method and device for multistate interferometric light modulation 0 2012
8,638,491 Device having a conductive light absorbing mask and method for fabricating same 2 2012
8,830,557 Methods of fabricating MEMS with spacers between plates and devices formed by same 0 2012
9,001,412 Electromechanical device with optical function separated from mechanical and electrical function 0 2012
9,086,564 Conductive bus structure for interferometric modulator array 0 2013
9,097,885 Device having a conductive light absorbing mask and method for fabricating same 0 2014
 
INNOLUCE B.V. (1)
8,526,089 MEMS scanning micromirror 0 2008
 
SERCALO MICROTECHNOLOGY LTD. (1)
* 2009/0059,344 MICROMIRROR DEVICE 2 2008
 
HONEYWELL INTERNATIONAL INC. (2)
* 8,335,083 Apparatus and method for thermal management using vapor chamber 1 2010
* 2011/0030,925 APPARATUS AND METHOD FOR THERMAL MANAGEMENT USING VAPOR CHAMBER 1 2010
 
LUMENTUM OPERATIONS LLC (4)
7,095,546 Micro-electro-mechanical-system two dimensional mirror with articulated suspension structures for high fill factor arrays 53 2004
* 2004/0212,907 Micro-electro-mechanical-system two dimensional mirror with articulated suspension structures for high fill factor arrays 15 2004
7,432,629 Articulated MEMs structures 6 2006
* 2006/0222,312 Articulated MEMs structures 1 2006
 
CALIENT TECHNOLOGIES, INC. (5)
6,585,383 Micromachined apparatus for improved reflection of light 9 2000
6,560,384 Optical switch having mirrors arranged to accommodate freedom of movement 23 2000
6,792,177 Optical switch with internal monitoring 14 2001
* 6,612,706 Micromachined apparatus for improved reflection of light 3 2001
6,578,974 Micromachined apparatus for improved reflection of light 3 2001
 
THE RESEARCH FOUNDATION OF STATE UNIVERSITY OF NEW YORK (1)
6,701,036 Mirror, optical switch, and method for redirecting an optical signal 1 2001
 
CARL ZEISS JENA GMBH (1)
6,882,473 Method for generating a stereoscopic image of an object and an arrangement for stereoscopic viewing 12 2002
 
RPX CLEARINGHOUSE LLC (2)
* 6,044,705 Micromachined members coupled for relative rotation by torsion bars 192 1997
6,467,345 Method of operating micromachined members coupled for relative rotation 31 2000
 
TRUSTEES OF BOSTON UNIVERSITY (2)
* 6,657,764 Very large angle integrated optical scanner made with an array of piezoelectric monomorphs 4 2000
* 7,929,195 MEMS based retroreflector 18 2005
 
KAWASAKI MICROELECTRONICS, INC. (1)
* 6,933,998 Display devices with integrated control elements and methods of making devices 2 2000
 
LEIDOS, INC. (7)
6,584,052 Method and apparatus for controlling the focus of a read/write head for an optical scanner 17 1998
6,341,118 Multiple channel scanning device using oversampling and image processing to increase throughput 5 1998
6,246,658 Multiple channel scanning device using optoelectronic switching 3 1998
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* 6,137,105 Multiple parallel source scanning device 18 1998
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6,559,438 Multiple parallel source scanning device 13 2000
 
AT&T CORP. (1)
* 6,556,318 Method and apparatus for signal and switch monitoring in an optical cross connect 5 1998
* Cited By Examiner