US Patent No: 5,661,591

Number of patents in Portfolio can not be more than 2000

Optical switch having an analog beam for steering light

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Importance

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Abstract

A spatial light modulator (40,70,80,90,130) operable in the analog mode for light beam steering or scanning applications. A deflectable mirror (42, 72) and which may be hexagonal (92, 132) is supported by a torsion hinge (44,86,94) ends along a torsion axis. A plurality of flexure hinges (48,82,106) are provided to support the ends of the mirror (42,72,92,132) and provide a restoration force. The combination of the torsion hinges and the flexure hinges realizes a deflectable pixel that is operable in the linear range for a large range of address voltages. The flexure hinges also maintain a flat undeflected state when no address voltage is applied, and prevent the pixel from collapsing. The pixel may be reinforced, such as about its perimeter (74) to ensure mirror flatness and prevent warping, even during extreme deflections of the mirror. The pixel is electrostatically deflected by applying an address voltage to an underlying address electrode (60,96,98). The hexagonal mirrors (92,132) allow a tightly packed mirror array, and have a closely circular surface area so as to efficiently reflect a light beam of circular cross section, such as a light beam from fiber optics.

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First Claim

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Patent Owner(s)

Patent OwnerAddressTotal Patents
TEXAS INSTRUMENTS INCORPORATEDDALLAS, TX17006

International Classification(s)

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  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Boysel, Robert Mark Hopewell Jct, NY 4 342
Congdon, Philip A Dallas, TX 9 590
Florence, James M Dallas, TX 43 3233
Lin, Tsen-Hwang Dallas, TX 30 2031
Magel, Gregory A Dallas, TX 26 1036

Cited Art

Patent Info (Count) # Cites Year
 
TEXAS INSTRUMENTS INCORPORATED (1)
5,489,952 Method and device for multi-format television 308 1993

Patent Citation Ranking

Forward Cites

Patent Info (Count) # Cites Year
 
QUALCOMM MEMS TECHNOLOGIES, INC. (36)
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7,893,919 Display region architectures 2 2005
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7,302,157 System and method for multi-level brightness in interferometric modulation 37 2005
7,321,456 Method and device for corner interferometric modulation 32 2005
7,372,613 Method and device for multistate interferometric light modulation 63 2005
7,420,725 Device having a conductive light absorbing mask and method for fabricating same 29 2005
7,719,500 Reflective display pixels arranged in non-rectangular arrays 26 2005
7,527,995 Method of making prestructure for MEMS systems 20 2005
RE42119 Microelectrochemical systems device and method for fabricating same 4 2005
8,008,736 Analog interferometric modulator device 0 2005
7,554,714 Device and method for manipulation of thermal response in a modulator 18 2005
7,304,784 Reflective display device having viewable display on both sides 33 2005
7,567,373 System and method for micro-electromechanical operation of an interferometric modulator 19 2005
7,936,497 MEMS device having deformable membrane characterized by mechanical persistence 0 2005
7,630,119 Apparatus and method for reducing slippage between structures in an interferometric modulator 10 2005
7,564,612 Photonic MEMS and structures 53 2005
7,327,510 Process for modifying offset voltage characteristics of an interferometric modulator 144 2005
7,684,104 MEMS using filler material and method 7 2005
7,236,284 Photonic MEMS and structures 82 2005
7,916,980 Interconnect structure for MEMS device 0 2006
7,550,810 MEMS device having a layer movable at asymmetric rates 19 2006
7,532,377 Movable micro-electromechanical device 28 2006
7,372,619 Display device having a movable structure for modulating light and method thereof 74 2006
7,649,671 Analog interferometric modulator device with electrostatic actuation and release 7 2006
7,471,442 Method and apparatus for low range bit depth enhancements for MEMS display architectures 4 2006
7,835,061 Support structures for free-standing electromechanical devices 4 2006
7,385,744 Support structure for free-standing MEMS device and methods for forming the same 42 2006
7,527,998 Method of manufacturing MEMS devices providing air gap control 10 2006
7,830,586 Transparent thin films 10 2006
7,554,711 MEMS devices with stiction bumps 30 2006
7,545,552 Sacrificial spacer process and resultant structure for MEMS support structure 4 2006
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7,719,752 MEMS structures, methods of fabricating MEMS components on separate substrates and assembly of same 2 2007
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7,830,589 Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator 0 2009
 
MIRADIA INC. (25)
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7,449,284 Method and structure for fabricating mechanical mirror structures using backside alignment techniques 0 2004
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7,068,417 Method and apparatus for a reflective spatial light modulator with a flexible pedestal 26 2004
7,206,110 Memory cell dual protection 4 2004
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7,298,539 Co-planar surface and torsion device mirror structure and method of manufacture for optical displays 1 2005
7,202,989 Method and device for fabricating a release structure to facilitate bonding of mirror devices onto a substrate 2 2005
7,190,508 Method and structure of patterning landing pad structures for spatial light modulators 0 2005
7,184,195 Method and structure reducing parasitic influences of deflection devices in an integrated spatial light modulator 40 2005
7,502,158 Method and structure for high fill factor spatial light modulator with integrated spacer layer 0 2005
7,369,297 Mirror structure with single crystal silicon cross-member 2 2005
7,233,428 Method and apparatus for a reflective spatial light modulator with a flexible pedestal 4 2006
7,670,880 Method and structure for forming an integrated spatial light modulator 0 2007
7,382,519 Method and device for fabricating a release structure to facilitate bonding of mirror devices onto a substrate 1 2007
7,570,416 Method and apparatus for a reflective spatial light modulator with a flexible pedestal 0 2007
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VENTURE LENDING & LEASING IV, INC. (21)
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7,167,297 Micromirror array 2 2004
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TEXAS INSTRUMENTS INCORPORATED (9)
5,943,157 Spatial light modulator having improved contrast ratio 45 1998
6,028,690 Reduced micromirror mirror gaps for improved contrast ratio 276 1998
6,147,790 Spring-ring micromechanical device 230 1999
6,038,056 Spatial light modulator having improved contrast ratio 252 1999
6,469,821 Micromirror structures for orthogonal illumination 19 2000
7,362,493 Micromirror and post arrangements on substrates 1 2005
7,075,702 Micromirror and post arrangements on substrates 8 2005
7,411,717 Micromirror device 2 2005
7,359,107 Analog MEMS with non-linear support 0 2006
 
SCIENCE APPLICATIONS INTERNATIONAL CORPORATION (7)
6,584,052 Method and apparatus for controlling the focus of a read/write head for an optical scanner 17 1998
6,341,118 Multiple channel scanning device using oversampling and image processing to increase throughput 4 1998
6,246,658 Multiple channel scanning device using optoelectronic switching 2 1998
6,166,756 Multiple channel data writing device 4 1998
6,137,105 Multiple parallel source scanning device 18 1998
6,091,067 Scanning device using fiber optic bimorph 19 1998
6,559,438 Multiple parallel source scanning device 1 2000
 
ADC TELECOMMUNICATIONS, INC. (6)
6,316,282 Method of etching a wafer layer using multiple layers of the same photoresistant material 1 1999
6,242,363 Method of etching a wafer layer using a sacrificial wall to form vertical sidewall 14 1999
6,229,640 Microelectromechanical optical switch and method of manufacture thereof 69 1999
6,682,871 Microelectromechanical optical switch and method of manufacture thereof 0 2001
6,801,682 Latching apparatus for a MEMS optical switch 4 2001
6,469,361 Semiconductor wafer 0 2001
 
CALIENT TECHNOLOGIES, INC. (5)
6,585,383 Micromachined apparatus for improved reflection of light 9 2000
6,560,384 Optical switch having mirrors arranged to accommodate freedom of movement 21 2000
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MICROVISION, INC. (5)
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NEOPHOTONICS CORPORATION (4)
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7,586,669 Non-contact micro mirrors 1 2006
 
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7,295,726 Gimbal-less micro-electro-mechanical-system tip-tilt and tip-tilt-piston actuators and a method for forming the same 3 2004
7,428,353 MEMS device control with filtered voltage signal shaping 2 2006
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SEIKO EPSON CORPORATION (3)
6,271,955 Method of manufacturing spatial light modulator and electronic device employing it 17 2000
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ASML NETHERLANDS B.V. (2)
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6,987,599 Pattern generator mirror configurations 2 2003
 
EXAJOULE LLC (2)
6,825,968 Micromirror systems with electrodes configured for sequential mirror attraction 15 2002
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HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P. (2)
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7,471,441 Flexures 0 2006
 
JDS UNIPHASE CORPORATION (2)
7,095,546 Micro-electro-mechanical-system two dimensional mirror with articulated suspension structures for high fill factor arrays 15 2004
7,432,629 Articulated MEMs structures 0 2006
 
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6,201,631 Process for fabricating an optical mirror array 67 2000
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RICOH COMPANY, LTD. (2)
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ROBERT BOSCH GMBH (2)
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ROCKSTAR BIDCO, LP (2)
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TRUSTEES OF BOSTON UNIVERSITY (2)
6,657,764 Very large angle integrated optical scanner made with an array of piezoelectric monomorphs 2 2000
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AT&T CORP. (1)
6,556,318 Method and apparatus for signal and switch monitoring in an optical cross connect 4 1998
 
CAPELLA PHOTONICS, INC. (1)
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DENSO CORPORATION (1)
6,795,603 Optical switch 4 2002
 
FUJITSU LIMITED (1)
6,473,221 Galvano-mirror and method of making the same 7 2001
 
HONEYWELL INTERNATIONAL INC. (1)
8,335,083 Apparatus and method for thermal management using vapor chamber 0 2010
 
INTEL CORPORATION (1)
6,437,903 Light modulator with two mirror sets 2 2002
 
KAWASAKI MICROELECTRONIC, INC. (1)
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MICRONIC LASER SYSTEMS AB (1)
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MIRRORCLE TECHNOLOGIES, INC. (1)
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NORTEL NETWORKS LIMITED (1)
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OMM, INC. (1)
6,567,574 Modular three-dimensional optical switch 23 2000
 
OPTICAL MICRO-MACHINES, INC. (1)
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SAMSUNG ELECTRONICS CO., LTD. (1)
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SARNOFF CORPORATION (1)
6,535,091 Microelectronic mechanical systems (MEMS) switch and method of fabrication 13 2001
 
SOLUS MICRO TECHNOLOGIES, INC. (1)
6,430,333 Monolithic 2D optical switch and method of fabrication 17 2000
 
THE RESEARCH FOUNDATION OF STATE UNIVERSITY OF NEW YORK (1)
6,701,036 Mirror, optical switch, and method for redirecting an optical signal 1 2001
 
WAH HONG INDUSTRIAL CORP. (1)
7,489,459 Lens actuating apparatus 0 2008