US Patent No: 5,661,591

Number of patents in Portfolio can not be more than 2000

Optical switch having an analog beam for steering light

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Abstract

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A spatial light modulator (40,70,80,90,130) operable in the analog mode for light beam steering or scanning applications. A deflectable mirror (42, 72) and which may be hexagonal (92, 132) is supported by a torsion hinge (44,86,94) ends along a torsion axis. A plurality of flexure hinges (48,82,106) are provided to support the ends of the mirror (42,72,92,132) and provide a restoration force. The combination of the torsion hinges and the flexure hinges realizes a deflectable pixel that is operable in the linear range for a large range of address voltages. The flexure hinges also maintain a flat undeflected state when no address voltage is applied, and prevent the pixel from collapsing. The pixel may be reinforced, such as about its perimeter (74) to ensure mirror flatness and prevent warping, even during extreme deflections of the mirror. The pixel is electrostatically deflected by applying an address voltage to an underlying address electrode (60,96,98). The hexagonal mirrors (92,132) allow a tightly packed mirror array, and have a closely circular surface area so as to efficiently reflect a light beam of circular cross section, such as a light beam from fiber optics.

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Patent Owner(s)

Patent OwnerAddressTotal Patents
TEXAS INSTRUMENTS INCORPORATEDDALLAS, TX18194

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Boysel, Robert Mark Hopewell Jct, NY 5 360
Congdon, Philip A Dallas, TX 9 619
Florence, James M Dallas, TX 50 3432
Lin, Tsen-Hwang Dallas, TX 30 2142
Magel, Gregory A Dallas, TX 26 1082

Cited Art Landscape

Patent Info (Count) # Cites Year
 
TEXAS INSTRUMENTS INCORPORATED (1)
5,489,952 Method and device for multi-format television 330 1993

Patent Citation Ranking

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Patent Info (Count) # Cites Year
 
QUALCOMM MEMS TECHNOLOGIES, INC. (39)
7,476,327 Method of manufacture for microelectromechanical devices 38 2004
7,893,919 Display region architectures 8 2005
7,289,259 Conductive bus structure for interferometric modulator array 66 2005
7,302,157 System and method for multi-level brightness in interferometric modulation 47 2005
7,321,456 Method and device for corner interferometric modulation 42 2005
7,372,613 Method and device for multistate interferometric light modulation 73 2005
7,420,725 Device having a conductive light absorbing mask and method for fabricating same 40 2005
7,719,500 Reflective display pixels arranged in non-rectangular arrays 37 2005
7,527,995 Method of making prestructure for MEMS systems 30 2005
RE42119 Microelectrochemical systems device and method for fabricating same 7 2005
8,008,736 Analog interferometric modulator device 4 2005
7,554,714 Device and method for manipulation of thermal response in a modulator 26 2005
7,304,784 Reflective display device having viewable display on both sides 44 2005
7,567,373 System and method for micro-electromechanical operation of an interferometric modulator 32 2005
7,936,497 MEMS device having deformable membrane characterized by mechanical persistence 5 2005
7,630,119 Apparatus and method for reducing slippage between structures in an interferometric modulator 18 2005
7,564,612 Photonic MEMS and structures 69 2005
7,327,510 Process for modifying offset voltage characteristics of an interferometric modulator 195 2005
7,684,104 MEMS using filler material and method 11 2005
7,236,284 Photonic MEMS and structures 93 2005
7,916,980 Interconnect structure for MEMS device 2 2006
7,550,810 MEMS device having a layer movable at asymmetric rates 27 2006
7,532,377 Movable micro-electromechanical device 37 2006
7,372,619 Display device having a movable structure for modulating light and method thereof 83 2006
7,649,671 Analog interferometric modulator device with electrostatic actuation and release 17 2006
7,471,442 Method and apparatus for low range bit depth enhancements for MEMS display architectures 7 2006
7,835,061 Support structures for free-standing electromechanical devices 10 2006
7,385,744 Support structure for free-standing MEMS device and methods for forming the same 50 2006
7,527,998 Method of manufacturing MEMS devices providing air gap control 13 2006
7,830,586 Transparent thin films 17 2006
7,554,711 MEMS devices with stiction bumps 43 2006
7,545,552 Sacrificial spacer process and resultant structure for MEMS support structure 7 2006
7,642,110 Method for fabricating a structure for a microelectromechanical systems (MEMS) device 17 2007
7,719,752 MEMS structures, methods of fabricating MEMS components on separate substrates and assembly of same 5 2007
8,085,458 Diffusion barrier layer for MEMS devices 0 2009
7,830,589 Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator 0 2009
8,817,357 Mechanical layer and methods of forming the same 0 2011
8,638,491 Device having a conductive light absorbing mask and method for fabricating same 0 2012
8,830,557 Methods of fabricating MEMS with spacers between plates and devices formed by same 0 2012
 
Miradia Inc. (26)
7,026,695 Method and apparatus to reduce parasitic forces in electro-mechanical systems 8 2003
7,118,234 Reflective spatial light modulator 5 2004
7,092,140 Architecture of a reflective spatial light modulator 9 2004
7,022,245 Fabrication of a reflective spatial light modulator 10 2004
7,449,284 Method and structure for fabricating mechanical mirror structures using backside alignment techniques 0 2004
7,034,984 Fabrication of a high fill ratio reflective spatial light modulator with hidden hinge 34 2004
6,992,810 High fill ratio reflective spatial light modulator with hidden hinge 36 2004
7,042,619 Mirror structure with single crystal silicon cross-member 21 2004
7,068,417 Method and apparatus for a reflective spatial light modulator with a flexible pedestal 26 2004
7,206,110 Memory cell dual protection 4 2004
7,172,921 Method and structure for forming an integrated spatial light modulator 4 2005
7,199,918 Electrical contact method and structure for deflection devices formed in an array configuration 0 2005
7,142,349 Method and structure for reducing parasitic influences of deflection devices on spatial light modulators 0 2005
7,298,539 Co-planar surface and torsion device mirror structure and method of manufacture for optical displays 1 2005
7,202,989 Method and device for fabricating a release structure to facilitate bonding of mirror devices onto a substrate 2 2005
7,190,508 Method and structure of patterning landing pad structures for spatial light modulators 0 2005
7,184,195 Method and structure reducing parasitic influences of deflection devices in an integrated spatial light modulator 48 2005
7,502,158 Method and structure for high fill factor spatial light modulator with integrated spacer layer 0 2005
7,369,297 Mirror structure with single crystal silicon cross-member 2 2005
7,233,428 Method and apparatus for a reflective spatial light modulator with a flexible pedestal 4 2006
7,670,880 Method and structure for forming an integrated spatial light modulator 1 2007
7,382,519 Method and device for fabricating a release structure to facilitate bonding of mirror devices onto a substrate 1 2007
7,570,416 Method and apparatus for a reflective spatial light modulator with a flexible pedestal 0 2007
7,428,094 Fabrication of a high fill ratio reflective spatial light modulator with hidden hinge 0 2007
8,207,004 Method and structure for forming a gyroscope and accelerometer 2 2009
8,530,259 Method and structure for forming a gyroscope and accelerometer 0 2012
 
VENTURE LENDING & LEASING IV, INC. (21)
6,950,223 Multiple hinge MEMS device 3 2003
6,867,897 Micromirrors and off-diagonal hinge structures for micromirror arrays in projection displays 24 2003
6,873,450 Micromirrors with mechanisms for enhancing coupling of the micromirrors with electrostatic fields 19 2003
7,019,376 Micromirror array device with a small pitch size 13 2003
7,300,162 Projection display 5 2004
7,196,740 Projection TV with improved micromirror array 7 2004
7,172,296 Projection display 9 2004
7,167,297 Micromirror array 2 2004
7,023,606 Micromirror array for projection TV 8 2004
7,018,052 Projection TV with improved micromirror array 5 2004
7,012,731 Packaged micromirror array for a projection display 4 2004
7,006,275 Packaged micromirror array for a projection display 5 2004
7,345,806 Method and apparatus for characterizing microelectromechanical devices on wafers 5 2004
7,212,359 Color rendering of illumination light in display systems 4 2004
7,131,762 Color rendering of illumination light in display systems 6 2004
7,262,817 Rear projection TV with improved micromirror array 11 2004
6,974,713 Micromirrors with mechanisms for enhancing coupling of the micromirrors with electrostatic fields 26 2005
7,671,428 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates 1 2005
7,655,492 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates 0 2005
7,573,111 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates 0 2005
7,286,278 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates 2 2005
 
TEXAS INSTRUMENTS INCORPORATED (9)
5,943,157 Spatial light modulator having improved contrast ratio 45 1998
6,028,690 Reduced micromirror mirror gaps for improved contrast ratio 289 1998
6,147,790 Spring-ring micromechanical device 240 1999
6,038,056 Spatial light modulator having improved contrast ratio 263 1999
6,469,821 Micromirror structures for orthogonal illumination 19 2000
7,362,493 Micromirror and post arrangements on substrates 3 2005
7,075,702 Micromirror and post arrangements on substrates 14 2005
7,411,717 Micromirror device 2 2005
7,359,107 Analog MEMS with non-linear support 0 2006
 
LEIDOS, INC. (7)
6,584,052 Method and apparatus for controlling the focus of a read/write head for an optical scanner 17 1998
6,341,118 Multiple channel scanning device using oversampling and image processing to increase throughput 4 1998
6,246,658 Multiple channel scanning device using optoelectronic switching 3 1998
6,166,756 Multiple channel data writing device 4 1998
6,137,105 Multiple parallel source scanning device 18 1998
6,091,067 Scanning device using fiber optic bimorph 25 1998
6,559,438 Multiple parallel source scanning device 3 2000
 
ADC TELECOMMUNICATIONS, INC. (6)
6,316,282 Method of etching a wafer layer using multiple layers of the same photoresistant material 1 1999
6,242,363 Method of etching a wafer layer using a sacrificial wall to form vertical sidewall 15 1999
6,229,640 Microelectromechanical optical switch and method of manufacture thereof 74 1999
6,682,871 Microelectromechanical optical switch and method of manufacture thereof 0 2001
6,801,682 Latching apparatus for a MEMS optical switch 4 2001
6,469,361 Semiconductor wafer 0 2001
 
CALIENT TECHNOLOGIES, INC. (5)
6,585,383 Micromachined apparatus for improved reflection of light 9 2000
6,560,384 Optical switch having mirrors arranged to accommodate freedom of movement 23 2000
6,792,177 Optical switch with internal monitoring 13 2001
6,612,706 Micromachined apparatus for improved reflection of light 3 2001
6,578,974 Micromachined apparatus for improved reflection of light 3 2001
 
MICROVISION, INC. (5)
6,285,489 Frequency tunable resonant scanner with auxiliary arms 52 1999
6,535,325 Frequency tunable resonant scanner with auxiliary arms 21 2001
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7,516,896 Frequency tunable resonant scanner with auxiliary arms 1 2005
 
NEOPHOTONICS CORPORATION (4)
6,600,587 Surface micromachined optical system with reinforced mirror microstructure 12 2001
6,791,730 Surface micromachined optical system with reinforced mirror microstructure 4 2003
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6,778,306 Surface micromachined optical system with reinforced mirror microstructure 71 2003
 
SPATIAL PHOTONICS, INC. (4)
7,391,556 Ultra-thin display system 0 2006
7,391,554 High fill-ratio mirror-based spatial light modulator 1 2006
7,388,708 Spatial light modulator multi-layer mirror plate 4 2006
7,586,669 Non-contact micro mirrors 2 2006
 
Adriatic Research Institute (3)
7,295,726 Gimbal-less micro-electro-mechanical-system tip-tilt and tip-tilt-piston actuators and a method for forming the same 10 2004
7,428,353 MEMS device control with filtered voltage signal shaping 9 2006
8,043,513 Gimbal-less micro-electro-mechanical-system tip-tilt and tip-tilt-piston actuators and a method for forming the same 2 2007
 
MICRONIC LASER SYSTEMS AB (3)
6,373,619 Pattern generator with improved address resolution 27 2000
6,987,599 Pattern generator mirror configurations 5 2003
7,034,986 Pattern generator mirror configurations 1 2005
 
SEIKO EPSON CORPORATION (3)
6,271,955 Method of manufacturing spatial light modulator and electronic device employing it 17 2000
6,452,712 Method of manufacturing spatial light modulator and electronic device employing it 92 2001
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Exajoule LLC (2)
6,825,968 Micromirror systems with electrodes configured for sequential mirror attraction 16 2002
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HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P. (2)
7,619,805 Light modulator device 1 2005
7,471,441 Flexures 0 2006
 
JDS UNIPHASE CORPORATION (2)
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LUCENT TECHNOLOGIES INC. (2)
6,201,631 Process for fabricating an optical mirror array 68 2000
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RICOH COMPANY, LTD. (2)
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7,166,486 Optical modulator, optical modulator manufacturing method, light information processing apparatus including optical modulator, image formation apparatus including optical modulator, and image projection and display apparatus including optical modulator 9 2005
 
ROBERT BOSCH GMBH (2)
6,449,079 Deflectable micro-mirror 28 2000
7,154,649 Device for deflecting optical beams 5 2002
 
ROCKSTAR CONSORTIUM US LP (2)
6,044,705 Micromachined members coupled for relative rotation by torsion bars 180 1997
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TRUSTEES OF BOSTON UNIVERSITY (2)
6,657,764 Very large angle integrated optical scanner made with an array of piezoelectric monomorphs 3 2000
7,929,195 MEMS based retroreflector 8 2005
 
UTAH STATE UNIVERSITY (2)
8,542,450 Kinematic optic mount 1 2011
8,792,191 Kinematic optic mount 0 2013
 
AT&T CORP. (1)
6,556,318 Method and apparatus for signal and switch monitoring in an optical cross connect 5 1998
 
Capella Photonics, Inc. (1)
7,209,274 High fill-factor bulk silicon mirrors 12 2003
 
CARL ZEISS JENA GMBH (1)
6,882,473 Method for generating a stereoscopic image of an object and an arrangement for stereoscopic viewing 9 2002
 
DENSO CORPORATION (1)
6,795,603 Optical switch 5 2002
 
FINISAR CORPORATION (1)
8,654,434 WSS with pixel gap compensation 0 2011
 
FUJITSU LIMITED (1)
6,473,221 Galvano-mirror and method of making the same 7 2001
 
HONEYWELL INTERNATIONAL INC. (1)
8,335,083 Apparatus and method for thermal management using vapor chamber 0 2010
 
INNOLUCE B.V. (1)
8,526,089 MEMS scanning micromirror 0 2008
 
INTEL CORPORATION (1)
6,437,903 Light modulator with two mirror sets 2 2002
 
KAWASAKI MICROELECTRONICS, INC. (1)
6,933,998 Display devices with integrated control elements and methods of making devices 2 2000
 
MIRRORCLE TECHNOLOGIES, INC. (1)
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NORTEL NETWORKS LIMITED (1)
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OMM, Inc. (1)
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OPTICAL MICRO-MACHINES, INC. (1)
6,556,741 MEMS optical switch with torsional hinge and method of fabrication thereof 7 2000
 
SAMSUNG ELECTRONICS CO., LTD. (1)
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SARNOFF CORPORATION (1)
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6,430,333 Monolithic 2D optical switch and method of fabrication 17 2000
 
THE REGENTS OF THE UNIVERSITY OF CALIFORNIA (1)
8,830,556 Metamaterials 0 2011
 
THE RESEARCH FOUNDATION OF STATE UNIVERSITY OF NEW YORK (1)
6,701,036 Mirror, optical switch, and method for redirecting an optical signal 1 2001
 
WAH HONG INDUSTRIAL CORP. (1)
7,489,459 Lens actuating apparatus 0 2008
 
Other [Check patent profile for assignment information] (1)
8,610,997 Micro-electromechanical device 0 2011