Optical switch having an analog beam for steering light

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 5661591
SERIAL NO

08537179

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A spatial light modulator (40,70,80,90,130) operable in the analog mode for light beam steering or scanning applications. A deflectable mirror (42, 72) and which may be hexagonal (92, 132) is supported by a torsion hinge (44,86,94) ends along a torsion axis. A plurality of flexure hinges (48,82,106) are provided to support the ends of the mirror (42,72,92,132) and provide a restoration force. The combination of the torsion hinges and the flexure hinges realizes a deflectable pixel that is operable in the linear range for a large range of address voltages. The flexure hinges also maintain a flat undeflected state when no address voltage is applied, and prevent the pixel from collapsing. The pixel may be reinforced, such as about its perimeter (74) to ensure mirror flatness and prevent warping, even during extreme deflections of the mirror. The pixel is electrostatically deflected by applying an address voltage to an underlying address electrode (60,96,98). The hexagonal mirrors (92,132) allow a tightly packed mirror array, and have a closely circular surface area so as to efficiently reflect a light beam of circular cross section, such as a light beam from fiber optics.

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Patent Owner(s)

Patent OwnerAddressTotal Patents
TEXAS INSTRUMENTS INCORPORATEDDALLAS, TX17077

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Boysel, Robert Mark Hopewell Jct, NY 10 396
Congdon, Philip A Dallas, TX 9 651
Florence, James M Richardson, TX 45 3857
Lin, Tsen-Hwang Dallas, TX 30 2340
Magel, Gregory A Dallas, TX 26 1168

Cited Art Landscape

Patent Info (Count) # Cites Year
 
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* Cited By Examiner

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Patent Info (Count) # Cites Year
 
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