Process for the ionization of thermally generated material vapors and a device for conducting the process
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United States of America Patent
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Sep 2, 1997
Grant Date -
N/A
app pub date -
Sep 22, 1994
filing date -
Jan 10, 1992
priority date (Note) -
Expired
status (Latency Note)
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Abstract
The present invention is directed to a process for ionizing material vapors generated thermally at reduced pressure, characterized in that the material vapors are exposed to electrons from the cathode spots 6 of a self-consuming cold cathode 3, 4, the thermal vaporization device 7 being connected as an anode, so that a vacuum arc discharge forms between cathode 3, 4 and anode 7. Another objective of the invention is a device for operating said process, wherein in a vacuum chamber 1, there is arranged a coolable cathode holder 3 having the cathode material 4 applied thereon for generating cathode spots on the self-consuming cold cathode, a thermal material vaporization system 7, 8, 9 connected as an anode, a wall 10 surrounding the cathode and connected as an auxiliary anode, which wall has an opening opposite the cathode.
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