Optical diffraction method and apparatus for integrated circuit lead inspection
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United States of America Patent
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Sep 2, 1997
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app pub date -
Jan 24, 1996
filing date -
Jan 24, 1996
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Expired
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Abstract
A technique for detecting damage of leads arranged in a generally parallel periodic pattern, includes the following steps: directing a coherent light beam at a plurality of adjacent leads; detecting an image at a distance from the leads at which the light beam would form a diffraction image having substantially uniform intensity when the leads form a substantially uniform pattern; moving the pattern of leads and the light beam with respect to each other; and detecting damage of leads from variation in intensity of the detected image.
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