Thin film actuated mirror array for use in an optical projection system and method for the manufacture thereof
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United States of America Patent
Stats
-
Sep 2, 1997
Grant Date -
N/A
app pub date -
Mar 7, 1995
filing date -
Mar 9, 1994
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
An array of M.times.N actuated mirrors comprises an active matrix, an array of M.times.N elastic members, an array of M.times.N pairs of actuating structures and an array of M.times.N mirrors. Each of the elastic members is provided with a distal and a proximal ends, the proximal end including a first and a second tab portions, the first tab and the second tab portions being separated by a retraction therebetween, the distal end including a protrusion. Each of the actuating structures is located on the first and the second tab portions on each of the elastic members, respectively. Each of the mirrors is formed on top of the elastic members. When the pair of actuating structures deform in response to an electrical signal, the first and the second tab portions tilt while the remainder of the elastic member, and, the mirror formed on top thereof, stays planar, thereby allowing all of the mirrors to reflect the light beams.
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