Process for generating negative tone resist images utilizing carbon dioxide critical fluid
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United States of America Patent
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Sep 9, 1997
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app pub date -
Feb 3, 1997
filing date -
Feb 17, 1995
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Abstract
The invention relates to a process for generating a negative tone resist image comprising the steps of (1) coating a substrate with a film of a polymeric composition comprising (i) a polymer, (ii) a photosensitive acid generator, and (iii) acid labile groups; (2) imagewise exposing the film to radiation to generate free acid; and (3) developing the image with critical fluid.
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