Apparatus and method for surface analysis
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United States of America Patent
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Sep 9, 1997
Grant Date -
N/A
app pub date -
May 24, 1996
filing date -
May 26, 1995
priority date (Note) -
Expired
status (Latency Note)
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Abstract
An apparatus and a method for the analysis of the surface of a specimen by the techniques of electron energy spectroscopy and secondary ion time-of-flight mass spectrometry. The apparatus provides a substantially conventional electron energy analyzer, typically having hemispherical electrodes. The energy analyzer is used as an ion deflector and in conjunction with a linear drift region and a pulsed primary ion beam gun provides a time-of-flight mass spectrometer having at least first-order time focusing properties. By using the energy analyzer in both techniques a combined instrument is provided at much lower cost than prior combined instruments which comprise different analyzers for the two techniques.
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