Grated landing area to eliminate sticking of micro-mechanical devices
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United States of America Patent
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Sep 9, 1997
Grant Date -
N/A
app pub date -
Mar 31, 1994
filing date -
Mar 31, 1994
priority date (Note) -
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Abstract
A digital micro-mirror device (10), whose contacting elements (11, 17) are not prone to stick together. In the case of a deflecting mirror device, landing electrodes (17) are covered with a grating (19), which reduces the contacting area but still permits conduction between the mirror (11) and the landing electrode (17). Alternatively, the landing electrode (17) can be fabricated as a grated surface.
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