Device for producing a plasma, enabling microwave propagation and absorption zones to be dissociated having at least two parallel applicators defining a propogation zone and an exciter placed relative to the applicator
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Sep 9, 1997
Grant Date -
N/A
app pub date -
Nov 2, 1995
filing date -
Nov 4, 1994
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
The invention relates to a distribution device for distributing microwave power to excite a plasma inside an enclosure. According to the invention, the distribution device includes at least one second applicator of microwave energy to co-operate with a first applicator and an exciter to form at least one excitation triplet in which firstly the first applicator and the second applicator are mounted substantially parallel to each other and are spaced apart by a given amount to define between them a propagation zone for microwave energy, and secondly the exciter is disposed inside the enclosure by being placed relative to the first and second applicators in such a manner that the trajectories of the electrons do not cross the propagation zone, thereby dissociating the propagation zone and the absorption zone.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully