Method and apparatus for forming an oxide passivation film on a weld
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United States of America Patent
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Sep 16, 1997
Grant Date -
N/A
app pub date -
Nov 23, 1994
filing date -
May 29, 1992
priority date (Note) -
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Abstract
A welding method for forming an oxide passivation film having corrosion resistance and an extremely small emission quantity of an outgas during welding at a weld portion and portions nearby, and a process apparatus requiring an ultrahigh-clean atmosphere. A back-shielding gas comprising an inert gas containing 1 ppb to 50 ppm of oxygen gas is caused to flow during a welding process, and an oxide passivation film comprising chromium oxide as a principal component is formed on the surface of the weld portion. In a process apparatus using welding for installing the apparatus, a back-shielding gas comprising an inert gas containing 1 ppb to 50 ppm of oxygen gas is caused to flow during a welding process and an oxide passivation film comprising chromium oxide as a principal component is formed on the surface of a weld portion.
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