Turntable for rotating a wafer carrier
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United States of America Patent
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-
Sep 23, 1997
Grant Date -
N/A
app pub date -
Dec 10, 1993
filing date -
Dec 10, 1993
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A turntable for rotating a wafer carrier in order to enable the attachment of a handle to the wafer carrier. The turntable includes a platform rotatably mounted to a baseplate. In addition, the turntable includes stops which are positioned to enable 180.degree. clockwise and counterclockwise rotation of the platform to provide access to the wafer carrier for handle attachment. The platform includes carrier guides which are spaced apart to accommodate the wafer carrier. The platform further includes a platform handle which an operator manipulates to rotate the platform.
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