Method and apparatus for covering bodies with a uniform glow discharge plasma and applications thereof
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United States of America Patent
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Sep 23, 1997
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N/A
app pub date -
Jun 6, 1994
filing date -
Jun 6, 1994
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Abstract
Method and apparatus for covering a free-standing body with a uniform glow discharge plasma, particularly at atmospheric pressure. The method may be used to provide a body coated with such a plasma, and also to treat a workpiece.
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