Spatial light modulator with buried passive charge storage cell array
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United States of America Patent
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Sep 23, 1997
Grant Date -
N/A
app pub date -
Feb 2, 1995
filing date -
Feb 2, 1995
priority date (Note) -
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Abstract
A monolithic DMD spatial light modulator (20) including a storage cell array (24) of charge storage elements (30). Each charge storage cell (30) is formed using robust MOS processes, and comprises a pair of capacitors (32) having a polysilicon electrode fabricated over a substrate, and separated by a thin oxide dielectric. Each capacitor (32) is shielded by several light impermeable metal shields (37, 64, 66, 68, 72, 74, 80, 82, 88) to prevent discharging due to light incident to SLM (20). The substrate electrode (38) is encompassed by an n+ doped region (42) providing a source of minority carriers to an inversion region under the polysilicon electrode (50).
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