Heat treatment apparatus and valve device for use in the same

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United States of America Patent

PATENT NO 5671903
SERIAL NO

08365460

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The present invention relates to a heat treatment apparatus, specifically a valve device for use in an exhaust system of a low pressure heat treatment furnace, which comprises urging device for urging a valve body in a valve closing direction, and a drive unit for opening/closing the valve body against an urging force of the urging device. An interconnection releasing mechanism is provided between the driving unit and the valve rod of the valve body, the interconnection releasing mechanism connecting both with each other, and releasing their connection in an emergency. Thus, an exhaust system of the low pressure heat treatment furnace is instantaneously shut off in an emergency to prevent reverse flow of exhaust gas into the furnace. An evacuation fine adjustment gap is defined between the periphery of the valve body and that of the valve casing for facilitating evacuation control.

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Patent Owner(s)

Patent OwnerAddress
TOKYO ELECTRON LIMITEDTOKYO

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Homma, Kenji Kanagawa-ken, JP 48 649
Nishi, Hironobu Kanagawa-ken, JP 22 632

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