US Patent No: 5,672,523
Number of patents in Portfolio can not be more than 2000
Thin film transistor substrate, manufacturing method thereof, liquid crystal display panel and liquid crystal display equipment
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Sep 30, 1997
Issued date -
May 26, 1995
filing date -
08/451,209
serial no -
In Force
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Abstract
The present invention concerns an active-matrix addressed TFT substrate using a thin film transistor, a manufacturing method and an anodic oxidation method thereof, a liquid crystal display panel using the TFT substrate and a liquid crystal display equipment using the liquid crystal display panel. Cr or Ta is used for gate terminals; aluminum or a metal composed mainly of aluminum is used for gate bus-lines extended therefrom, gate electrodes and thin film capacitances (additional capacitance, storage capacitance); and an anodic oxidized film composed of the metal and free from defect is used for at least one of gate insulators, dielectric films of the thin film capacitances and interlayer insulation films for the intersections between the bus-lines. In forming a selective oxidation mask to a desired region on the aluminum pattern with a positive type photoresist, for the anodic oxidation, an angle (.theta.) formed between the selective oxidation mask and the aluminum pattern is made as: .beta..gtoreq.110-20T(T: film thickness of the positive type photoresist). The photoresist is subjected to a heat treatment prior to and after exposure, preferably the after-treatment being performed before developing. The anodic oxidation film is heat-treated after formation, to reduce the leak current.
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First Claim
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International Classification(s)
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Cited Art
| Patent Info | (Count) | # Cites | Year |
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| 5,146,301 Terminal electrode structure of a liquid crystal panel display | 24 | 1988 | |
| 5,054,887 Active matrix type liquid crystal display | 92 | 1989 | |
| 5,155,564 Thin-film transistor array | 12 | 1990 | |
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| 4,905,066 Thin-film transistor | 97 | 1989 | |
| 5,028,551 Electrode interconnection material, semiconductor device using this material and driving circuit substrate for display device | 67 | 1990 | |
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| 4,496,981 Video camera with a monitor | 37 | 1984 | |
| 4,775,549 Method of producing a substrate structure for a large size display panel and an apparatus for producing the substrate structure | 30 | 1985 | |
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| 4,885,232 High temperature post exposure baking treatment for positive photoresist compositions | 16 | 1986 | |
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| 4,543,573 Display panel | 28 | 1982 | |
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| 5,021,320 Polyamide containing the hexafluoroisopropylidene group with O-quinone diazide in positive working photoresist | 27 | 1989 | |
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| 4,990,460 Fabrication method for thin film field effect transistor array suitable for liquid crystal display | 18 | 1990 | |
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| 4,821,092 Thin film transistor array for liquid crystal display panel | 70 | 1987 | |
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| 4,918,504 Active matrix cell | 27 | 1988 | |
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| 5,070,379 Thin-film transistor matrix for active matrix display panel with alloy electrodes | 36 | 1990 | |
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| 5,034,340 Amorphous silicon thin film transistor array substrate and method for producing the same | 23 | 1989 | |
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| 5,142,390 MIM element with a doped hard carbon film | 51 | 1990 | |