Importance

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Abstract

The micromechanical electrostatic relay has, on the one hand, a base substrate with base electrode and a base contact piece and, on the other hand, an armature substrate with an armature spring tongue that is etched free and curved away from the base substrate, and that has an armature electrode and an armature contact piece. When a control voltage is applied between the two electrodes, the spring tongue unrolls on the base substrate until it is stretched and causes the two contact pieces to touch. In order to obtain a high contacting force given an optimally large electrode area, the armature contact piece is arranged on a contact spring section that is cut free from the spring tongue via spring webs in the form of a sun wheel with spoke sections helically interengaging such that it is surrounded on all sides by the spring tongue.

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First Claim