Stepper light control using movable blades
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United States of America Patent
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-
Oct 7, 1997
Grant Date -
N/A
app pub date -
Oct 20, 1995
filing date -
Oct 21, 1994
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
The present invention discloses a light control means in a stepper. The light control means of the present invention has a twofold structure consisted of at least more than two blades which open a circuit pattern designed on a reticle; and a subblade which can close selectively a portion of the circuit pattern. The sub-blade is mounted above or below one of the at least more than two blades, and is movable in every directions in response to the instruction from the blade control system. Accordingly, the present invention provides a exposure process which can selectively cover only the dies that will be overlapped with the EBR gap of the wafer using sub-blade, thereby increasing the number of the net-die.
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Cited Art Landscape
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