Integrated capacitive transducer
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United States of America Patent
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Oct 14, 1997
Grant Date -
N/A
app pub date -
Sep 20, 1994
filing date -
Sep 11, 1992
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
An integrated capacitive transducer (1) which includes a membrane having a movable part (4) with an electrode, a fixed plate (6) with a counter-electrode (8), and an electrode and counter-electrode support structure (10). The fixed plate (6) also has an electret (30) which is disposed facing the movable part (4), is separated from the membrane by an open space (16), and has a first electrically conductive layer (32) embedded in an insulating material (34, 36). The invention has particular applications in hearing aids.
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