Method for depositing a substance with temperature control
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United States of America Patent
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Oct 21, 1997
Grant Date -
N/A
app pub date -
Jun 7, 1995
filing date -
Jun 7, 1995
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A method for depositing a substance, such as diamond, on a surface of a substrate with temperature control, which comprises the steps of providing a cooling block having a surface that is cooled by heat exchange; supporting said substrate from said cooling block so that the bottom surface of said substrate is spaced from said cooling block surface by a gap, the size of said gap being in the range of 0.01 cm to 0.30 cm; providing a gas in said gap; and depositing said substance on the top surface of said substrate, whereby heat, resulting from said depositing of said substance, flows by conduction across said gap from said substrate to said cooling block.
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