Sputtered carbon overcoat in a thin-film medium and sputtering method
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United States of America Patent
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Oct 21, 1997
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N/A
app pub date -
Apr 1, 1994
filing date -
Oct 8, 1993
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Abstract
A thin-film magnetic recording medium having a carbon overcoat composed of an overcoat sublayer and an overcoat surface layer is described. The overcoat surface layer is a hydrogen- or nitrogen-containing sputtered carbon layer with high wear-resistance. The overcoat sublayer functions to reduce the diffusion of nitrogen or hydrogen from the surface layer to the magnetic recording layer. Also described is a method of sputtering the nitrogen-containing surface layer in which the graphite target is attached to the target electrode by thermally conducting, electrically conducting materials.
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