High purity composite useful as furnace components
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United States of America Patent
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Nov 4, 1997
Grant Date -
N/A
app pub date -
Feb 27, 1995
filing date -
Feb 27, 1995
priority date (Note) -
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Abstract
A Czochralski process furnace component comprises a high purity, semiconductor standard composite including a carbon fiber reinforced carbon matrix having a level of metal impurity below the detection limit of inductively coupled plasma spectroscopy. A process for producing the components includes heat treatment of the carbon fiber and the components.
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