Method for the fabrication of micro-electromechanical ceramic parts
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United States of America Patent
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Nov 4, 1997
Grant Date -
N/A
app pub date -
Nov 14, 1996
filing date -
Nov 14, 1996
priority date (Note) -
Expired
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Abstract
Micro-electromechanical ceramic parts are formed using green ceramic and a sacrificial material that has a higher melting temperature than the sintering temperature of the green ceramic to form electrical trace paths. After the sintering of the ceramic part the sacrificial material is removed by etching or by elevating the temperature of the part above the melting temperature of the sacrificial material. The void left by the removal of the sacrificial material is then filled with a molten metal which when cooled forms the electrical trace for the fabricated part.
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