Positioning stage device exposure apparatus and device manufacturing method utilizing the same
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United States of America Patent
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Nov 11, 1997
Issued Date -
N/A
app pub date -
Nov 6, 1996
filing date -
Oct 19, 1993
priority date (Note) -
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status (Latency Note)
Importance
Abstract
A positioning stage device capable of regulating in a wide range the rotational angle of a Z-stage supporting a suction chuck. The suction chuck is constructed integrally with the Z-stage, which is supported by a bearing so as to be movable along the Z-axis and rotatable about the Z-axis. A rotation stopper plate integral with the Z-stage is supported on both faces by bearing pads of an air bearing supported by a rotary ring, and is rotated about the Z-axis together with the air bearing by means of a motor, whereby the rotational angel of the Z-stage is regulated.
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