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Abstract

A method and apparatus for image signal decoupling in position-transmitting high-vacuum electromagnetic radiation quanta or particle detectors. The electromagnetic radiation quanta or particles impinge on a spatially resolving anode structure through a photoelectron converter layer (in the case of electromagnetic radiation) and directly through an electron multiplier as an electron avalanche (in the case of particle radiation). The electron avalanche is first collected for a short time inside the vacuum on the anode side by means of a high-resistance, conducting semiconductor thin film, and is then read out capacitively from the outside through the glass bottom (counter-substrate) of the detector device as an image charge by means of a low-resistance anode layer of suitable structure. The capacitive decoupling permits high spatial resolution when the internal resistances of the charge collecting layer and the readout anode layer are optimally adapted to one another. The decoupling requires only a simple high-resistance monolayer in the vacuum with a single voltage contact. The spatially resolving anode structure outside the vacuum can be modified or exchanged to individually adapt the spatial resolution.

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